Nanopatterning by AFM-nanooxidation of thin aluminium layers as a tool for the prototyping of nanoelectromechanical systems

F. Pérez-Murano, Z. Davis, E. Forsen, M. Dong, J. Montserrat, G. Abadal, C. Martín, X. Borrisé, A. Boisen, N. Barniol, Edit María Cruz Acero y Manuel Lozano (Editor)

    Research output: Chapter in BookChapterResearch

    Original languageEnglish
    Title of host publicationLibro de comunicaciones en CD: 4a Conferencia de dispositivos electrónicos, Calella-Barcelona, 12-14 febrero 2003
    Place of PublicationCalella (ES)
    Pages97-
    Edition1
    Publication statusPublished - 1 Jan 2003

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