Nanomodification on silicon (100) surface with scanning tunnelling microscopy using a polysilicon on silicon structure

F. Pérez Murano, N. Barniol, G. Abadal, X. Aymerich, C. Cané

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)85-93
JournalMater. sci. technol.
Volume11
Publication statusPublished - 1 Jan 1995

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