Nanomodification of silicon (100) surface with scanning tunnelling microscopy using polysilicon on silicon structure

F. Pérez, G. Abadal, N. Barniol, X. Aymerich, C. Cané, J.H. Ye

Research output: Contribution to journalArticleResearch

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)85-93
JournalMater. sci. technol.
Volume0
Issue number11
Publication statusPublished - 1 Jan 1995

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