Nanometer Scale Oxidation of Si(100) Surfaces with Scanning Tunneling Microscopy: Application to Lithography.: Primera Conferencia de Dispositivos Electrónicos.

F Pérez; G Abadal; N Barniol; X Aymerich; R Alcubilla; J Pond

Nanometer Scale Oxidation of Si(100) Surfaces with Scanning Tunneling Microscopy: Application to Lithography. Primera Conferencia de Dispositivos Electrónicos.

F Pérez, G Abadal, N Barniol, X Aymerich, R Alcubilla (Editor), J Pond (Editor)

Research output: Book/Report › Proceeding › Research

Original language	Undefined/Unknown
Place of Publication	- (ES)
Number of pages	5
Publication status	Published - Jul 1997

Cite this

@book{2432317d2ef14f62baf752dc9f81367c,

title = "Nanometer Scale Oxidation of Si(100) Surfaces with Scanning Tunneling Microscopy: Application to Lithography.: Primera Conferencia de Dispositivos Electr{\'o}nicos.",

author = "F P{\'e}rez and G Abadal and N Barniol and X Aymerich",

editor = "R Alcubilla and J Pond",

year = "1997",

month = jul,

language = "Indefinido/desconocido",

}

TY - BOOK

T1 - Nanometer Scale Oxidation of Si(100) Surfaces with Scanning Tunneling Microscopy: Application to Lithography.

T2 - Primera Conferencia de Dispositivos Electrónicos.

AU - Pérez, F

AU - Abadal, G

AU - Barniol, N

AU - Aymerich, X

A2 - Alcubilla, R

A2 - Pond, J

PY - 1997/7

Y1 - 1997/7

M3 - Libro de Actas

BT - Nanometer Scale Oxidation of Si(100) Surfaces with Scanning Tunneling Microscopy: Application to Lithography.

CY - - (ES)

ER -