Nanometer scale lithography of silicon (100) surfaces with tapping mode AFM

J. Servat, P. Gorostiza, F. Sanz, F. Pérez, G. Abadal, N. Barniol, X. Aymerich

    Research output: Contribution to journalArticleResearch

    31 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1208-1212
    JournalJournal of Vacuum Science & Technology (A)
    Volume14
    Publication statusPublished - 1 Jan 1996

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