Nanometer scale lithography of silicon (100) surfaces with tapping mode AFM

J. Servat, P. Gorostiza, F. Sanz, F. Pérez, G. Abadal, N. Barniol, X. Aymerich

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	1208-1212
Journal	Journal of Vacuum Science & Technology (A)
Volume	14
Publication status	Published - 1 Jan 1996

Cite this

@article{6eca6ab230e54ccda072898d078d8381,

title = "Nanometer scale lithography of silicon (100) surfaces with tapping mode AFM",

author = "J. Servat and P. Gorostiza and F. Sanz and F. P{\'e}rez and G. Abadal and N. Barniol and X. Aymerich",

year = "1996",

month = jan,

day = "1",

language = "English",

volume = "14",

pages = "1208--1212",

journal = "Journal of Vacuum Science & Technology (A)",

issn = "0734-2101",

}

TY - JOUR

T1 - Nanometer scale lithography of silicon (100) surfaces with tapping mode AFM

AU - Servat, J.

AU - Gorostiza, P.

AU - Sanz, F.

AU - Pérez, F.

AU - Abadal, G.

AU - Barniol, N.

AU - Aymerich, X.

PY - 1996/1/1

Y1 - 1996/1/1

M3 - Article

SN - 0734-2101

VL - 14

SP - 1208

EP - 1212

JO - Journal of Vacuum Science & Technology (A)

JF - Journal of Vacuum Science & Technology (A)

ER -