Nanometer-scale leakage current measurements in high vacuum on de-processed high-k capacitors

W. Polspoel, W. Vandervorst, L. Aguilera, M. Porti, M. Nafría, X. Aymerich

Research output: Contribution to journalArticleResearch

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)1521-1524
JournalMicroelectronics and Reliability
Volume48
Publication statusPublished - 1 Jan 2008

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