Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

F. Torres, J. Teva, J. Ll Lopez, A. Uranga, G. Abadal, N. Barniol, A. Sánchez-Amores, J. Montserrat, F. Pérez-Murano, J. Esteve

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6 Citations (Scopus)

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Physics & Astronomy