Nanometer-scale analysis of current limited stresses impact on SiOsub 2nosub gate oxide reliability using C-AFM

Research output: Contribution to journalArticleResearch

38 Citations (Scopus)
Original languageEnglish
Pages (from-to)55-60
JournalIEEE Trans. Nanotechn.
Volume3
Issue number1
DOIs
Publication statusPublished - 1 Jan 2004

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