Nanometer-scale analysis of current limited stresses impact on SiOsub 2nosub gate oxide reliability using C-AFM

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@article{3d7a4a8056df465d95c18ad679b972fd,

title = "Nanometer-scale analysis of current limited stresses impact on SiOsub 2nosub gate oxide reliability using C-AFM",

author = "M. Porti and M. Nafr{\'i}a and X. Aymerich",

year = "2004",

month = jan,

day = "1",

doi = "10.1109/TNANO.2004.824023",

language = "English",

volume = "3",

pages = "55--60",

number = "1",

}