Nanometer accuracy with continuous scans at the ALBA-NOM

J. Nicolas, P. Pedreira, I. Sics, C. Ramírez, J. Campos

Research output: Contribution to journalArticleResearch

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)996203 -1--12
JournalProc. SPIE
Volume9962
Publication statusPublished - 1 Jan 2016

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