Original language | Undefined/Unknown |
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Place of Publication | - (US) |
Number of pages | 4 |
Publication status | Published - Jul 1997 |
Nanofabrication of electronic devices by field induced oxidation: Advantages of using Tapping Mode AFM. 3rd International Workshop on Quantum Functional Devices(QFD'97). NIST/FED
F Pérez, G Abadal, N Barniol, X Aymerich, R García, Research and development association for future electron devices (Editor)
Research output: Book/Report › Proceeding › Research