Nanoelectromechanical Systems (NEMS)

Liviu Nicu; Vaida Auzelyte; Luis Guillermo Villanueva; Nuria Barniol; Francesc Perez-Murano; Warner J. Venstra; Herre S.J. van der Zant; Gabriel Abadal; Veronica Savu; Jürgen Brugger

doi:10.1002/9783527676330.ch9

Nanoelectromechanical Systems (NEMS)

Liviu Nicu, Vaida Auzelyte, Luis Guillermo Villanueva, Nuria Barniol, Francesc Perez-Murano, Warner J. Venstra, Herre S.J. van der Zant, Gabriel Abadal, Veronica Savu, Jürgen Brugger

Research output: Chapter in Book › Chapter › Research › peer-review

1 Citation (Scopus)

Abstract

© 2015 Wiley-VCH Verlag GmbH & Co. KGaA. This chapter offers an update of the activities in the research and development of nanoelectromechanical systems (NEMS) over the past several years. It highlights work done on fundamental studies using NEMS, their transduction schemes, nonlinear behavior, NEMS fabrication, and incorporation of novel materials. Fundamental and characteristic properties of NEMS, for example, high surface-to-volume ratios, extremely small masses, and small onsets of nonlinearity, make NEMS an outstanding scientific tool to study different physical phenomena that would otherwise be not accessible. NEMS devices play a role in future electronics both in the analog and digital areas. High-frequency NEMS are attracting more and more interest as a new class of sensors and actuators for potential applications to single (bio)molecule sensing. The impact of NEMS technology in the energy-harvesting field, that is, a discipline aiming to convert ambient energy into useful electrical energy to power ultra low consumption ICT devices, is still incipient.

Original language	English
Title of host publication	Resonant MEMS: Principles, Modeling, Implementation, and Applications
Pages	203-231
Number of pages	28
DOIs	https://doi.org/10.1002/9783527676330.ch9
Publication status	Published - 21 Aug 2015

Keywords

Bio-NEMS
Electrical energy
Energy harvesting field
Nanoelectromechanical systems (NEMS)
Transduction schemes

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10.1002/9783527676330.ch9

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title = "Nanoelectromechanical Systems (NEMS)",

abstract = "{\textcopyright} 2015 Wiley-VCH Verlag GmbH & Co. KGaA. This chapter offers an update of the activities in the research and development of nanoelectromechanical systems (NEMS) over the past several years. It highlights work done on fundamental studies using NEMS, their transduction schemes, nonlinear behavior, NEMS fabrication, and incorporation of novel materials. Fundamental and characteristic properties of NEMS, for example, high surface-to-volume ratios, extremely small masses, and small onsets of nonlinearity, make NEMS an outstanding scientific tool to study different physical phenomena that would otherwise be not accessible. NEMS devices play a role in future electronics both in the analog and digital areas. High-frequency NEMS are attracting more and more interest as a new class of sensors and actuators for potential applications to single (bio)molecule sensing. The impact of NEMS technology in the energy-harvesting field, that is, a discipline aiming to convert ambient energy into useful electrical energy to power ultra low consumption ICT devices, is still incipient.",

keywords = "Bio-NEMS, Electrical energy, Energy harvesting field, Nanoelectromechanical systems (NEMS), Transduction schemes",

author = "Liviu Nicu and Vaida Auzelyte and Villanueva, {Luis Guillermo} and Nuria Barniol and Francesc Perez-Murano and Venstra, {Warner J.} and {van der Zant}, {Herre S.J.} and Gabriel Abadal and Veronica Savu and J{\"u}rgen Brugger",

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doi = "10.1002/9783527676330.ch9",

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AU - Nicu, Liviu

AU - Auzelyte, Vaida

AU - Villanueva, Luis Guillermo

AU - Barniol, Nuria

AU - Perez-Murano, Francesc

AU - Venstra, Warner J.

AU - van der Zant, Herre S.J.

AU - Abadal, Gabriel

AU - Savu, Veronica

AU - Brugger, Jürgen

PY - 2015/8/21

Y1 - 2015/8/21

N2 - © 2015 Wiley-VCH Verlag GmbH & Co. KGaA. This chapter offers an update of the activities in the research and development of nanoelectromechanical systems (NEMS) over the past several years. It highlights work done on fundamental studies using NEMS, their transduction schemes, nonlinear behavior, NEMS fabrication, and incorporation of novel materials. Fundamental and characteristic properties of NEMS, for example, high surface-to-volume ratios, extremely small masses, and small onsets of nonlinearity, make NEMS an outstanding scientific tool to study different physical phenomena that would otherwise be not accessible. NEMS devices play a role in future electronics both in the analog and digital areas. High-frequency NEMS are attracting more and more interest as a new class of sensors and actuators for potential applications to single (bio)molecule sensing. The impact of NEMS technology in the energy-harvesting field, that is, a discipline aiming to convert ambient energy into useful electrical energy to power ultra low consumption ICT devices, is still incipient.

AB - © 2015 Wiley-VCH Verlag GmbH & Co. KGaA. This chapter offers an update of the activities in the research and development of nanoelectromechanical systems (NEMS) over the past several years. It highlights work done on fundamental studies using NEMS, their transduction schemes, nonlinear behavior, NEMS fabrication, and incorporation of novel materials. Fundamental and characteristic properties of NEMS, for example, high surface-to-volume ratios, extremely small masses, and small onsets of nonlinearity, make NEMS an outstanding scientific tool to study different physical phenomena that would otherwise be not accessible. NEMS devices play a role in future electronics both in the analog and digital areas. High-frequency NEMS are attracting more and more interest as a new class of sensors and actuators for potential applications to single (bio)molecule sensing. The impact of NEMS technology in the energy-harvesting field, that is, a discipline aiming to convert ambient energy into useful electrical energy to power ultra low consumption ICT devices, is still incipient.

KW - Bio-NEMS

KW - Electrical energy

KW - Energy harvesting field

KW - Nanoelectromechanical systems (NEMS)

KW - Transduction schemes

U2 - 10.1002/9783527676330.ch9

DO - 10.1002/9783527676330.ch9

M3 - Chapter

SN - 9783527676330

SN - 9783527335459

SP - 203

EP - 231

BT - Resonant MEMS: Principles, Modeling, Implementation, and Applications

ER -

Nanoelectromechanical Systems (NEMS)

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Keywords

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