Nano-patterning of perpendicular magnetic recording media by low-energy implantation of chemically reactive ions

M. S. Martín-González, F. Briones, J. M. García-Martín, J. Montserrat, L. Vila, G. Faini, A. M. Testa, D. Fiorani, H. Rohrmann

    Research output: Contribution to journalArticleResearchpeer-review

    13 Citations (Scopus)

    Abstract

    Magnetic nano-patterning of perpendicular hard disk media with perpendicular anisotropy, but preserving disk surface planarity, is presented here. Reactive ion implantation is used to locally modify the chemical composition (hence the magnetization and magnetic anisotropy) of the Co/Pd multilayer in irradiated areas. The procedure involves low energy, chemically reactive ion irradiation through a resist mask. Among N, P and As ions, P are shown to be most adequate to obtain optimum bit density and topography flatness for industrial Co/Pd multilayer media. The effect of this ion contributes to isolate perpendicular bits by destroying both anisotropy and magnetic exchange in the irradiated areas. Low ion fluences are effective due to the stabilization of atomic displacement levels by the chemical effect of covalent impurities. © 2010 Elsevier B.V. All rights reserved.
    Original languageEnglish
    Pages (from-to)2762-2768
    JournalJournal of Magnetism and Magnetic Materials
    Volume322
    Issue number18
    DOIs
    Publication statusPublished - 1 Jan 2010

    Keywords

    • CoPd multilayer
    • Hard drive
    • Multilayer medium
    • Nanoimprint lithography
    • Perpendicular magnetic recording

    Fingerprint

    Dive into the research topics of 'Nano-patterning of perpendicular magnetic recording media by low-energy implantation of chemically reactive ions'. Together they form a unique fingerprint.

    Cite this