Multilayer ISFET membranes for microsystems applications

C. Cané, A. Götz, A. Merlos, I. Gràcia, A. Errachid, P. Losantos, E. Lora-Tamayo

    Research output: Contribution to journalArticleResearchpeer-review

    28 Citations (Scopus)

    Abstract

    The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.
    Original languageEnglish
    Pages (from-to)136-140
    JournalSensors and Actuators, B: Chemical
    Volume35
    Issue number1-3
    DOIs
    Publication statusPublished - 1 Jan 1996

    Keywords

    • Microsystem applications
    • Multilayer ISFET membranes

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