Multilayer ISFET membranes for microsystems applications

C. Cané; A. Götz; A. Merlos; I. Gràcia; A. Errachid; P. Losantos; E. Lora-Tamayo

doi:10.1016/S0925-4005(97)80043-3

Multilayer ISFET membranes for microsystems applications

C. Cané, A. Götz, A. Merlos, I. Gràcia, A. Errachid, P. Losantos, E. Lora-Tamayo

Institut de Microelectrònica de Barcelona

Research output: Contribution to journal › Article › Research › peer-review

30 Citations (Scopus)

Abstract

The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.

Original language	English
Pages (from-to)	136-140
Journal	Sensors and Actuators, B: Chemical
Volume	35
Issue number	1-3
DOIs	https://doi.org/10.1016/S0925-4005(97)80043-3
Publication status	Published - 1 Jan 1996

Keywords

Microsystem applications
Multilayer ISFET membranes

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10.1016/S0925-4005(97)80043-3

Cite this

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AU - Errachid, A.

AU - Losantos, P.

AU - Lora-Tamayo, E.

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N2 - The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.

AB - The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.

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KW - Multilayer ISFET membranes

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DO - 10.1016/S0925-4005(97)80043-3

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Multilayer ISFET membranes for microsystems applications

Abstract

Keywords

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