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Abstract
This paper presents a multielement annular ring ultrasound transducer formed by individual high-frequency PMUTs (17.5 MHz in air and 8.7 MHz in liquid) intended for high-precision axial focalization and high-performance ultrasound imaging. The prototype has five independent multielement rings fabricated by a monolithic process over CMOS, allowing for a very compact and robust design. Crosstalk between rings is under 56 dB, which guarantees an efficient beam focusing on a range between 1.4 mm and 67 µm. The presented PMUT-on-CMOS annular array with an overall diameter down to 669 µm achieves an output pressure in liquid of 4.84 kPa/V/mm2 at 1.5 mm away from the array when the five channels are excited together, which is the largest reported for PMUTs. Pulse-echo experiments towards high-resolution imaging are demonstrated using the central ring as a receiver. With an equivalent diameter of 149 µm, this central ring provides high receiving sensitivity, 441.6 nV/Pa, higher than that of commercial hydrophones with equivalent size. A 1D ultrasound image using two channels is demonstrated, with maximum received signals of 7 mVpp when a nonintegrated amplifier is used, demonstrating the ultrasound imaging capabilities.
Original language | English |
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Article number | 14 |
Number of pages | 18 |
Journal | Sensors |
Volume | 21 |
Issue number | 14 |
DOIs | |
Publication status | Published - 13 Jul 2021 |
Keywords
- AlN
- Annular array
- PMUT-on-CMOS
- PMUTs
- Pulse-echo
- Ring array
- Ultrasound
- Ultrasound imaging
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Dive into the research topics of 'Multielement ring array based on minute size pmuts for high acoustic pressure and tunable focus depth'. Together they form a unique fingerprint.Projects
- 1 Finished
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SMART MULTIFREQUENCY HIGH-RESOLUTION PIEZO-MEMS-ON-CMOS ULTRASONIC TRANSDUCERS FOR BIOMETRICS AND IMAGING APPLICATIONS
Barniol Beumala, N. (Principal Investigator), Uranga del Monte, M. A. (Co-Investigador/a Principal), Campanella Pineda, H. (Collaborator), Ledesma Valdes, E. (Collaborator), Yáñez Sotelo, J. (Collaborator), Zamora Díaz Comas, I. (Collaborator) & Torres Canals, F. (Investigator)
1/06/20 → 29/02/24
Project: Research Projects and Other Grants