Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

J. Verd*, A. Uranga, G. Abadal, J. Teva, F. Torres, F. Ṕrez-Murano, J. Fraxedas, J. Esteve, N. Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

56 Citations (Scopus)

Abstract

Monolithic mass sensors for ultrasensitive mass detection in air conditions have been fabricated using a conventional 0.35 μm complementary metal-oxide-semiconductor (CMOS) process. The mass sensors are based on electrostatically excited submicrometer scale cantilevers integrated with CMOS electronics. The devices have been calibrated obtaining an experimental sensitivity of 6× 10-11 g cm2 Hz equivalent to 0.9 agHz for locally deposited mass. Results from time-resolved mass measurements are also presented. An evaluation of the mass resolution have been performed obtaining a value of 2.4× 10-17 g in air conditions, resulting in an improvement of these devices from previous works in terms of sensitivity, resolution, and fabrication process complexity.

Original languageEnglish
Article number013501
JournalApplied physics letters
Volume91
Issue number1
DOIs
Publication statusPublished - 2007

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