Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Z. J. Davis, G. Abadal, B. Helbo, O. Hansen, F. Campabadal, F. Pérez-Murano, J. Esteve, E. Figueras, J. Verd, N. Barniol, A. Boisen

Research output: Contribution to journalArticleResearchpeer-review

43 Citations (Scopus)


Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)311-319
JournalSensors and Actuators, A: Physical
Publication statusPublished - 15 Aug 2003


  • CMOS circuitry
  • Mass sensing nano-cantilevers
  • Monolithic integration


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