Abstract
Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.
Original language | English |
---|---|
Pages (from-to) | 311-319 |
Journal | Sensors and Actuators, A: Physical |
Volume | 105 |
DOIs | |
Publication status | Published - 15 Aug 2003 |
Keywords
- CMOS circuitry
- Mass sensing nano-cantilevers
- Monolithic integration