Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Z. J. Davis; G. Abadal; B. Helbo; O. Hansen; F. Campabadal; F. Pérez-Murano; J. Esteve; E. Figueras; J. Verd; N. Barniol; A. Boisen

doi:https://doi.org/10.1016/S0924-4247(03)00208-5

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Z. J. Davis, G. Abadal, B. Helbo, O. Hansen, F. Campabadal, F. Pérez-Murano, J. Esteve, E. Figueras, J. Verd, N. Barniol, A. Boisen

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

42 Citations (Scopus)

Abstract

Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	311-319
Journal	Sensors and Actuators, A: Physical
Volume	105
DOIs	https://doi.org/10.1016/S0924-4247(03)00208-5
Publication status	Published - 15 Aug 2003

Keywords

CMOS circuitry
Mass sensing nano-cantilevers
Monolithic integration

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title = "Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry",

abstract = "Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. {\textcopyright} 2003 Elsevier Science B.V. All rights reserved.",

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year = "2003",

month = aug,

day = "15",

doi = "https://doi.org/10.1016/S0924-4247(03)00208-5",

language = "English",

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Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry. / Davis, Z. J.; Abadal, G.; Helbo, B.; Hansen, O.; Campabadal, F.; Pérez-Murano, F.; Esteve, J.; Figueras, E.; Verd, J.; Barniol, N.; Boisen, A.

In: Sensors and Actuators, A: Physical, Vol. 105, 15.08.2003, p. 311-319.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

AU - Davis, Z. J.

AU - Abadal, G.

AU - Helbo, B.

AU - Hansen, O.

AU - Campabadal, F.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Verd, J.

AU - Barniol, N.

AU - Boisen, A.

PY - 2003/8/15

Y1 - 2003/8/15

N2 - Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.

AB - Miniaturization of cantilever dimensions will increase both the mass and spatial resolution of a resonating cantilever-based mass sensor, which monitors the mass change of the cantilever by measuring its resonant frequency shift. A fabrication method for nanometer-sized cantilevers with electrostatic excitation and integrated capacitive readout is introduced. The dynamic behavior of the nanometer-sized cantilever is characterized at atmospheric pressure using optical microscopy and in vacuum using scanning electron microscopy (SEM). A monolithic integration method for combining the nano-cantilevers with CMOS circuitry is described in detail. The circuitry is used to enhance the capacitive readout. The fabrication results, showing integrated nano-cantilevers with a CMOS analog amplification circuit, are presented along with preliminary electrical characterization of the device. © 2003 Elsevier Science B.V. All rights reserved.

KW - CMOS circuitry

KW - Mass sensing nano-cantilevers

KW - Monolithic integration

U2 - https://doi.org/10.1016/S0924-4247(03)00208-5

DO - https://doi.org/10.1016/S0924-4247(03)00208-5

M3 - Article

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SP - 311

EP - 319

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