Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationThe 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09
Place of PublicationDenver (US)
Pages2429-2432
Number of pages3
Edition1
Publication statusPublished - 1 Jan 2009

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