Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

J. Verd, M. Sansa, A. Uranga, C. Pey, G. Abadal, F. Pérez-Murano, N. Barniol

Research output: Chapter in Book › Chapter › Research

Original language	English
Title of host publication	The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09
Place of Publication	Denver (US)
Pages	2429-2432
Number of pages	3
Edition	1
Publication status	Published - 1 Jan 2009

Cite this

@inbook{345d47e6b39945a987b5fdd66a2381cd,

title = "Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions",

author = "J. Verd and M. Sansa and A. Uranga and C. Pey and G. Abadal and F. P{\'e}rez-Murano and N. Barniol",

year = "2009",

month = jan,

day = "1",

language = "English",

isbn = "978-1-4244-4193-8",

pages = "2429--2432",

booktitle = "The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09",

edition = "1",

}

The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09. 1. ed. Denver (US), 2009. p. 2429-2432.

Research output: Chapter in Book › Chapter › Research

TY - CHAP

T1 - Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

AU - Verd, J.

AU - Sansa, M.

AU - Uranga, A.

AU - Pey, C.

AU - Abadal, G.

AU - Pérez-Murano, F.

AU - Barniol, N.

PY - 2009/1/1

Y1 - 2009/1/1

M3 - Chapter

SN - 978-1-4244-4193-8

SP - 2429

EP - 2432

BT - The 15th international conference on solid-state sensors, actuators and microsystems. Transducers'09

CY - Denver (US)

ER -