Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

Jaume Verd*, A. Uranga, G. Abadal, J. L. Teva, F. Torres, J. López, F. Pérez-Murano, J. Esteve, Nuria Barniol

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

118 Citations (Scopus)


This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ∼ 1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35-μm CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ∼ 6 MHz, a relative low quality factor of 100, and a large motional resistance of ∼25 MΩ. The MEMS oscillator has a frequency stability of ∼ 1.6 Hz resulting in a mass resolution of ∼1 ag (1 ag = 10-18 g) in air conditions.

Original languageEnglish
Pages (from-to)146-148
Number of pages3
JournalIEEE Electron Device Letters
Issue number2
Publication statusPublished - Feb 2008


  • Allan deviation
  • CMOS-microelectromechanical system (MEMS)
  • Micromechanical oscillator
  • Microsensor
  • Resonant sensing
  • System-on-chip (SoC)


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