Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

Jaume Verd; A. Uranga; G. Abadal; J. L. Teva; F. Torres; J. López; F. Pérez-Murano; J. Esteve; Nuria Barniol

doi:10.1109/LED.2007.914085

Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

Jaume Verd^*, A. Uranga, G. Abadal, J. L. Teva, F. Torres, J. López, F. Pérez-Murano, J. Esteve, Nuria Barniol

^*Corresponding author for this work

Department of Electronic Engineering

Research output: Contribution to journal › Article › Research › peer-review

118 Citations (Scopus)

Abstract

This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ∼ 1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35-μm CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ∼ 6 MHz, a relative low quality factor of 100, and a large motional resistance of ∼25 MΩ. The MEMS oscillator has a frequency stability of ∼ 1.6 Hz resulting in a mass resolution of ∼1 ag (1 ag = 10^-18 g) in air conditions.

Original language	English
Pages (from-to)	146-148
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	29
Issue number	2
DOIs	https://doi.org/10.1109/LED.2007.914085
Publication status	Published - Feb 2008

Keywords

Allan deviation
CMOS-microelectromechanical system (MEMS)
Micromechanical oscillator
Microsensor
Resonant sensing
System-on-chip (SoC)

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10.1109/LED.2007.914085

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title = "Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range",

abstract = "This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ∼ 1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35-μm CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ∼ 6 MHz, a relative low quality factor of 100, and a large motional resistance of ∼25 MΩ. The MEMS oscillator has a frequency stability of ∼ 1.6 Hz resulting in a mass resolution of ∼1 ag (1 ag = 10-18 g) in air conditions.",

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AU - Uranga, A.

AU - Abadal, G.

AU - Teva, J. L.

AU - Torres, F.

AU - López, J.

AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Barniol, Nuria

PY - 2008/2

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AB - This letter presents the design, fabrication, and demonstration of a CMOS/microelectromechanical system (MEMS) electrostatically self-excited resonator based on a submicrometer-scale cantilever with ∼ 1 ag/Hz mass sensitivity. The mechanical resonator is the frequency-determining element of an oscillator circuit monolithically integrated and implemented in a commercial 0.35-μm CMOS process. The oscillator is based on a Pierce topology adapted for the MEMS resonator that presents a mechanical resonance frequency of ∼ 6 MHz, a relative low quality factor of 100, and a large motional resistance of ∼25 MΩ. The MEMS oscillator has a frequency stability of ∼ 1.6 Hz resulting in a mass resolution of ∼1 ag (1 ag = 10-18 g) in air conditions.

KW - Allan deviation

KW - CMOS-microelectromechanical system (MEMS)

KW - Micromechanical oscillator

KW - Microsensor

KW - Resonant sensing

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Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

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Keywords

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