Monolithic 0.35-mu m CMOS cantilever for mass sensing in the attogram range with self-excitation

J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J. L. Lopez, F. Perez-Murano, J. Fraxedas, J. Esteve, N. Barniol, IEEE

Research output: Contribution to journalArticleResearchpeer-review

Original languageUndefined/Unknown
JournalTransducers '07 & Eurosensors Xxi, Digest of Technical Papers, Vols 1 and 2
Publication statusPublished - 2007

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