Monolithic 0.35-Mm Cmos cantilever for mass sensing in the attogram range with self-excitation

J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J.L. López, F. Pérez-Murano, J. Fraxedas, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationThe 14th international conference on solid-state sensors, actuators and microsystems. Transducers 2007 & Eurosensors XXI 10 June - 14 June 2007, Lyon, France
Place of PublicationLyon (FR)
Pages233-236
Number of pages3
Edition1
Publication statusPublished - 1 Jan 2007

Cite this

Verd, J., Uranga, A., Teva, J., Abadal, G., Torres, F., Arcamone, J., López, J. L., Pérez-Murano, F., Fraxedas, J., Esteve, J., & Barniol, N. (2007). Monolithic 0.35-Mm Cmos cantilever for mass sensing in the attogram range with self-excitation. In The 14th international conference on solid-state sensors, actuators and microsystems. Transducers 2007 & Eurosensors XXI 10 June - 14 June 2007, Lyon, France (1 ed., pp. 233-236).