Monolithic 0.35-Mm Cmos cantilever for mass sensing in the attogram range with self-excitation

J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J.L. López, F. Pérez-Murano, J. Fraxedas, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationThe 14th international conference on solid-state sensors, actuators and microsystems. Transducers 2007 & Eurosensors XXI 10 June - 14 June 2007, Lyon, France
Place of PublicationLyon (FR)
Number of pages3
Publication statusPublished - 1 Jan 2007

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