Original language | English |
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Title of host publication | The 14th international conference on solid-state sensors, actuators and microsystems. Transducers 2007 & Eurosensors XXI 10 June - 14 June 2007, Lyon, France |
Place of Publication | Lyon (FR) |
Pages | 233-236 |
Number of pages | 3 |
Edition | 1 |
Publication status | Published - 1 Jan 2007 |
Monolithic 0.35-Mm Cmos cantilever for mass sensing in the attogram range with self-excitation
J. Verd, A. Uranga, J. Teva, G. Abadal, F. Torres, J. Arcamone, J.L. López, F. Pérez-Murano, J. Fraxedas, J. Esteve, N. Barniol
Research output: Chapter in Book › Chapter › Research