Abstract
In this work, the effects of a gate-to-channel dielectric breakdown on the output characteristics of advanced La2O3-based metal-oxide-semiconductor field-effect transistors (MOSFETs) are investigated. The electrical behaviour is modeled using a potentiometer-like resistor network. It is shown how the relevant features that characterize a breakdown event in an MOS transistor: location of the failure site along the device channel, post-breakdown oxide resistance, and post-breakdown channel resistance, affect the mutual and drain transconductances of the device. The connection with the nonlinear current source model for broken down transistors is also discussed. © 2013 Elsevier B.V. All rights reserved.
Original language | English |
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Pages (from-to) | 322-325 |
Journal | Microelectronic Engineering |
Volume | 109 |
DOIs | |
Publication status | Published - 3 May 2013 |
Keywords
- MOS
- MOSFET
- Oxide breakdown
- Oxide reliability