Micropower thermoelectric generator from thin Si membranes

A. P. Perez-Marín; A. F. Lopeandía; Ll Abad; P. Ferrando-Villaba; A. M. Lopez; F. X. Muñoz-Pascual; J. Rodríguez-Viejo; Gemma Garcia Alonso

doi:https://doi.org/10.1016/j.nanoen.2013.12.007

Micropower thermoelectric generator from thin Si membranes

A. P. Perez-Marín, A. F. Lopeandía^*, Ll Abad, P. Ferrando-Villaba, A. M. Lopez, F. X. Muñoz-Pascual, J. Rodríguez-Viejo, Gemma Garcia Alonso

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › Research › peer-review

50 Citations (Scopus)

Abstract

We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm², under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.

Original language	English
Pages (from-to)	73-80
Number of pages	8
Journal	Nano Energy
Volume	4
DOIs	https://doi.org/10.1016/j.nanoen.2013.12.007 https://doi.org/10.1016/j.nanoen.2013.12.007
Publication status	Published - Mar 2014

Keywords

Low-dimensional Si
Planar thermoelectric generator
Power output
Si membrane

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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@article{288633fd0b4c4212a641e615134541ee,

title = "Micropower thermoelectric generator from thin Si membranes",

abstract = "We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.",

keywords = "Low-dimensional Si, Planar thermoelectric generator, Power output, Si membrane",

author = "Perez-Mar{\'i}n, {A. P.} and Lopeand{\'i}a, {A. F.} and Ll Abad and P. Ferrando-Villaba and Lopez, {A. M.} and Mu{\~n}oz-Pascual, {F. X.} and J. Rodr{\'i}guez-Viejo and {Garcia Alonso}, Gemma",

note = "Funding Information: Researchers from GNaM acknowledge financial support from Generalitat de Catalunya SGR2009-01225 , from the Ministerio de Industria TSI-020100-2011-0354 (Avanza Si4Te), from the Ministerio de Econom{\'i}a y Competitividad CSD2010-00044 ( Consolider NANOTHERM ) and MAT2010-15202 and from the Marie Curie European Reintegration Grant within the 7th European Community Framework Programme . PFV acknowledge Ministerio de Educaci{\'o}n, Cultura y Deporte his FPU predoctoral fellowship and Ll. Abad acknowledge CSIC for her JAE-DOC postdoctoral contract partially funded by ESF. ",

year = "2014",

month = mar,

doi = "https://doi.org/10.1016/j.nanoen.2013.12.007",

language = "English",

volume = "4",

pages = "73--80",

journal = "Nano Energy",

issn = "2211-2855",

publisher = "Elsevier BV",

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TY - JOUR

T1 - Micropower thermoelectric generator from thin Si membranes

AU - Perez-Marín, A. P.

AU - Lopeandía, A. F.

AU - Abad, Ll

AU - Ferrando-Villaba, P.

AU - Lopez, A. M.

AU - Muñoz-Pascual, F. X.

AU - Rodríguez-Viejo, J.

AU - Garcia Alonso, Gemma

N1 - Funding Information: Researchers from GNaM acknowledge financial support from Generalitat de Catalunya SGR2009-01225 , from the Ministerio de Industria TSI-020100-2011-0354 (Avanza Si4Te), from the Ministerio de Economía y Competitividad CSD2010-00044 ( Consolider NANOTHERM ) and MAT2010-15202 and from the Marie Curie European Reintegration Grant within the 7th European Community Framework Programme . PFV acknowledge Ministerio de Educación, Cultura y Deporte his FPU predoctoral fellowship and Ll. Abad acknowledge CSIC for her JAE-DOC postdoctoral contract partially funded by ESF.

PY - 2014/3

Y1 - 2014/3

N2 - We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.

AB - We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.

KW - Low-dimensional Si

KW - Planar thermoelectric generator

KW - Power output

KW - Si membrane

UR - http://www.scopus.com/inward/record.url?scp=84892506662&partnerID=8YFLogxK

U2 - https://doi.org/10.1016/j.nanoen.2013.12.007

DO - https://doi.org/10.1016/j.nanoen.2013.12.007

M3 - Article

SN - 2211-2855

VL - 4

SP - 73

EP - 80

JO - Nano Energy

JF - Nano Energy

ER -

Micropower thermoelectric generator from thin Si membranes

Abstract

Keywords

UN SDGs

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