Micropower thermoelectric generator from thin Si membranes

A. P. Perez-Marín, A. F. Lopeandía*, Ll Abad, P. Ferrando-Villaba, A. M. Lopez, F. X. Muñoz-Pascual, J. Rodríguez-Viejo, Gemma Garcia Alonso

*Corresponding author for this work

Research output: Contribution to journalArticleResearchpeer-review

50 Citations (Scopus)


We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.

Original languageEnglish
Pages (from-to)73-80
Number of pages8
JournalNano Energy
Publication statusPublished - Mar 2014


  • Low-dimensional Si
  • Planar thermoelectric generator
  • Power output
  • Si membrane


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