Micropower thermoelectric generator from thin Si membranes

A. P. Perez-Marín, A. F. Lopeandía, Ll Abad, P. Ferrando-Villaba, G. Garcia, A. M. Lopez, F. X. Muñoz-Pascual, J. Rodríguez-Viejo

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34 Citations (Scopus)

Abstract

We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermopower under various thermal gradients. This proof-of-concept device produces an output power density of 4.5μW/cm2, under a temperature difference of 5K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging. © 2013 Elsevier Ltd.
Original languageEnglish
Pages (from-to)73-80
JournalNano Energy
Volume4
DOIs
Publication statusPublished - 1 Mar 2014

Keywords

  • Low-dimensional Si
  • Planar thermoelectric generator
  • Power output
  • Si membrane

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