Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

J. Arcamone, G. Rius, G. Abadal, J. Teva, N. Barniol, F. Pérez-Murano

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	1216-1220
Journal	Microelectronic Engineering
Volume	4
Issue number	9
Publication status	Published - 1 Jan 2006

Cite this

@article{6be87793e6134ca091a529f8a23f4a72,

title = "Micro/nanomechanical resonators for distributed mass sensing with capacitive detection",

author = "J. Arcamone and G. Rius and G. Abadal and J. Teva and N. Barniol and F. P{\'e}rez-Murano",

year = "2006",

month = jan,

day = "1",

language = "English",

volume = "4",

pages = "1216--1220",

journal = "Microelectronic Engineering",

issn = "0167-9317",

number = "9",

}