Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

J. Arcamone, G. Rius, G. Abadal, J. Teva, N. Barniol, F. Pérez-Murano

Research output: Contribution to journalArticleResearch

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)1216-1220
JournalMicroelectronic Engineering
Volume4
Issue number9
Publication statusPublished - 1 Jan 2006

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