Micromachined optical fiber current sensor

R. L. Heredero, Ramón Fernández De Caleya, Héctor Guerrero, Pere Los Santos, Mari Cruz Acero, Jaume Esteve

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    Abstract

    We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 μm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometry with an optical fiber low-finesse Fabry–Perot microcavity. A measurement range of 0–70 A and a minimum detectable intensity of 20 mA were obtained when distance D between the membrane and the electrical power line was 5 mm. The output signal directly shows a linear response with distance D. © 1999 Optical Society of America.
    Original languageEnglish
    Pages (from-to)5298-5305
    JournalApplied Optics
    Volume38
    Issue number25
    DOIs
    Publication statusPublished - 1 Sep 1999

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    Heredero, R. L., Caleya, R. F. D., Guerrero, H., Santos, P. L., Acero, M. C., & Esteve, J. (1999). Micromachined optical fiber current sensor. Applied Optics, 38(25), 5298-5305. https://doi.org/10.1364/AO.38.005298