Abstract
We describe a micromachined optical fiber current sensor. The sensing element consists of a squared silicon membrane (8 mm long and 20 μm thick) that has a cylindrical permanent magnet (NdFeB alloy, 3-mm diameter, 1.5 mm high) fixed on its central region. This structure allows the permanent magnet to vibrate in the presence of the magnetic field gradient generated by an ac. A linear relation between the electrical current and the magnet displacement was measured with white-light interferometry with an optical fiber low-finesse Fabry–Perot microcavity. A measurement range of 0–70 A and a minimum detectable intensity of 20 mA were obtained when distance D between the membrane and the electrical power line was 5 mm. The output signal directly shows a linear response with distance D. © 1999 Optical Society of America.
Original language | English |
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Pages (from-to) | 5298-5305 |
Journal | Applied Optics |
Volume | 38 |
Issue number | 25 |
DOIs | |
Publication status | Published - 1 Sept 1999 |