Micro-cantilever signal transduction: electrical detection of multiple resonant modes

A. Uranga, J. Verd, F. Torres, J. Teva, J.Ll López, G. Abadal, N. Barniol, J. Esteve, F. Pérez-Murano

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationProceedings of the XXI Conference on Design of Circuits and Integrated Circuits
Place of PublicationBarcelona (ES)
Number of pages3
Publication statusPublished - 1 Jan 2006

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