Micro and nano analysis of 0.2Ωmm Ti/Al/Ni/Au ohmic contact to AlGaN/GaN

A. Fontserè, A. Pérez-Tomás, M. Placidi, J. Llobet, N. Baron, S. Chenot, Y. Cordier, J. C. Moreno, P. M. Gammon, M.R. Jennings, M. Porti, A. Bayerl, M. Lanza, M. Nafría

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)2135-104-2013504-3
JournalApplied Physics Letters
Volume99
Publication statusPublished - 1 Jan 2011

Cite this