Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

A. Abrutis; A. Bartasyte; G. Garcia; A. Teiserskis; V. Kubilius; Z. Saltyte; V. Faucheux; A. Figueras; S. Rushworth

doi:10.1016/S0040-6090(03)01404-4

Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

A. Abrutis^*, A. Bartasyte, G. Garcia, A. Teiserskis, V. Kubilius, Z. Saltyte, V. Faucheux, A. Figueras, S. Rushworth

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Article › Research › peer-review

20 Citations (Scopus)

Abstract

Perovskite oxide layers, i.e. manganites La_1-x(Sr,Ca) _xMnO₃, ferrates La_1-xSr_xFe _1-yCo_yO₃, gallates La_1-xSr _xGa_1-y(Co,Ni,Fe)_yO₃ of a thickness of 0.8-2 μm, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxygen permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen.

Original language	English
Pages (from-to)	94-99
Number of pages	6
Journal	Thin Solid Films
Volume	449
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(03)01404-4
Publication status	Published - 2 Feb 2004

Keywords

Chemical vapor deposition (CVD)
Coatings
Deposition process
Oxides

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title = "Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates",

abstract = "Perovskite oxide layers, i.e. manganites La1-x(Sr,Ca) xMnO3, ferrates La1-xSrxFe 1-yCoyO3, gallates La1-xSr xGa1-y(Co,Ni,Fe)yO3 of a thickness of 0.8-2 μm, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxygen permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen.",

keywords = "Chemical vapor deposition (CVD), Coatings, Deposition process, Oxides",

author = "A. Abrutis and A. Bartasyte and G. Garcia and A. Teiserskis and V. Kubilius and Z. Saltyte and V. Faucheux and A. Figueras and S. Rushworth",

note = "Funding Information: The authors acknowledge financial support from European Community (FP5 CERMOX project, contract G5RD-CT-2000-00351).",

year = "2004",

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doi = "10.1016/S0040-6090(03)01404-4",

language = "English",

volume = "449",

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T1 - Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

AU - Abrutis, A.

AU - Bartasyte, A.

AU - Garcia, G.

AU - Teiserskis, A.

AU - Kubilius, V.

AU - Saltyte, Z.

AU - Faucheux, V.

AU - Figueras, A.

AU - Rushworth, S.

N1 - Funding Information: The authors acknowledge financial support from European Community (FP5 CERMOX project, contract G5RD-CT-2000-00351).

PY - 2004/2/2

Y1 - 2004/2/2

N2 - Perovskite oxide layers, i.e. manganites La1-x(Sr,Ca) xMnO3, ferrates La1-xSrxFe 1-yCoyO3, gallates La1-xSr xGa1-y(Co,Ni,Fe)yO3 of a thickness of 0.8-2 μm, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxygen permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen.

AB - Perovskite oxide layers, i.e. manganites La1-x(Sr,Ca) xMnO3, ferrates La1-xSrxFe 1-yCoyO3, gallates La1-xSr xGa1-y(Co,Ni,Fe)yO3 of a thickness of 0.8-2 μm, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxygen permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen.

KW - Chemical vapor deposition (CVD)

KW - Coatings

KW - Deposition process

KW - Oxides

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U2 - 10.1016/S0040-6090(03)01404-4

DO - 10.1016/S0040-6090(03)01404-4

M3 - Article

AN - SCOPUS:1042292763

SN - 0040-6090

VL - 449

SP - 94

EP - 99

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

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Keywords

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