Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

J. Verd, M. Sansa, A. Uranga, F. Perez-Murano, J. Segura, N. Barniol

Research output: Contribution to journalArticleResearch

15 Citations (Scopus)
Original languageEnglish
Pages (from-to)2670-2672
JournalLab on a Chip Journal
Volume11
Issue number6
DOIs
Publication statusPublished - 1 Jan 2011

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