Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

J. Verd, M. Sansa, A. Uranga, F. Perez-Murano, J. Segura, N. Barniol

Research output: Contribution to journalReview articleResearchpeer-review

15 Citations (Scopus)

Abstract

Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH. © 2011 The Royal Society of Chemistry.
Original languageEnglish
Pages (from-to)2670-2672
JournalLab on a Chip
Volume11
Issue number16
DOIs
Publication statusPublished - 21 Aug 2011

Fingerprint Dive into the research topics of 'Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution'. Together they form a unique fingerprint.

Cite this