MEMS with integrated CMOS read-out circuit based on submicrometric cantilevers array for multiple sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, E. Figueras, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationSPIE International Symposium on Microtechnologies for The New Millenium
Place of PublicationSevilla (ES)
Pages78-85
Number of pages7
Edition1
Publication statusPublished - 1 May 2005

Publication series

NameProceedings of SPIE; 5836

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