MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, E. Figueras, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)78-85
JournalProceedings of SPIE, The international Society for Optical Engineering
Volume5836
Issue number9
DOIs
Publication statusPublished - 1 Jan 2005

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