MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing

M. Villarroya, J. Verd, J. Teva, G. Abadal, E. Figueras, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)78-85
JournalProceedings of SPIE, The international Society for Optical Engineering
Volume5836
Issue number9
DOIs
Publication statusPublished - 1 Jan 2005

Cite this

Villarroya, M., Verd, J., Teva, J., Abadal, G., Figueras, E., Pérez-Murano, F., Esteve, J., & Barniol, N. (2005). MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing. Proceedings of SPIE, The international Society for Optical Engineering, 5836(9), 78-85. https://doi.org/10.1117/12.608354