MEMS Mass sensor with atto-gram/Hz sensitivity based on a polysilicon cantilever array integrated monolithically with CMOS circuit

M. Villarroya, J. Teva, E. Forsen, J. Verd, G. Abadal, J. Montserrat, J. Esteve, F. Pérez-Murano, A. Boisen, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationEUROSENSORS XIX BARCELONA. SPAIN 11th-14th September 2005
Place of PublicationBarcelona (ES)
Pages-
Edition1
Publication statusPublished - 1 Jan 2005

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