Mechanical sensors integrated in a commercial CMOS technology

Joan Bausells, Jordi Carrabina, Angel Merlos, Sebastian Bota, Josep Samitier

    Research output: Contribution to journalArticleResearchpeer-review

    9 Citations (Scopus)

    Abstract

    Pressure sensors and accelerometer structures have been fabricated in a commercial CMOS foundry technology (1.0 μm from Atmel-ES2) using a post-processing for back-side wafer micromachining. The overall technology (CMOS plus post-processing) can be used for integrated sensor system design through a specific design kit in the standard foundry design environment. Fabrication is then performed so that post-processing is transparent to the user. © 1997 Elsevier Science S.A.
    Original languageEnglish
    Pages (from-to)698-704
    JournalSensors and Actuators, A: Physical
    Volume62
    DOIs
    Publication statusPublished - 1 Jan 1997

    Keywords

    • Accelerometers
    • CMOS
    • Post-processing
    • Pressure sensors

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