Pressure sensors and accelerometer structures have been fabricated in a commercial CMOS foundry technology (1.0 μm from Atmel-ES2) using a post-processing for back-side wafer micromachining. The overall technology (CMOS plus post-processing) can be used for integrated sensor system design through a specific design kit in the standard foundry design environment. Fabrication is then performed so that post-processing is transparent to the user. © 1997 Elsevier Science S.A.
|Journal||Sensors and Actuators, A: Physical|
|Publication status||Published - 1 Jan 1997|
- Pressure sensors