Abstract
The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.
Original language | English |
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Pages (from-to) | 105-111 |
Journal | Optica Pura y Aplicada |
Volume | 45 |
Issue number | 2 |
DOIs | |
Publication status | Published - 27 Dec 2012 |
Keywords
- Diffraction
- Micro-electro-mechanical systems