The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.
|Journal||Optica Pura y Aplicada|
|Publication status||Published - 27 Dec 2012|
- Micro-electro-mechanical systems