Measurement of the vibration state of an array of micro cantilevers by diffractional methods

A. Cuadrado; J. Agustí; M. López-Suárez; G. Murillo; G. Abadal; J. Alda

doi:10.7149/OPA.45.2.105

Measurement of the vibration state of an array of micro cantilevers by diffractional methods

A. Cuadrado, J. Agustí, M. López-Suárez, G. Murillo, G. Abadal, J. Alda

Research output: Contribution to journal › Article › Research › peer-review

Abstract

The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.

Original language	English
Pages (from-to)	105-111
Journal	Optica Pura y Aplicada
Volume	45
Issue number	2
DOIs	https://doi.org/10.7149/OPA.45.2.105
Publication status	Published - 27 Dec 2012

Keywords

Diffraction
Micro-electro-mechanical systems

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abstract = "The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. {\textcopyright} Sociedad Espa{\~n}ola de {\'O}ptica.",

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AU - Agustí, J.

AU - López-Suárez, M.

AU - Murillo, G.

AU - Abadal, G.

AU - Alda, J.

PY - 2012/12/27

Y1 - 2012/12/27

N2 - The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.

AB - The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.

KW - Diffraction

KW - Micro-electro-mechanical systems

U2 - 10.7149/OPA.45.2.105

DO - 10.7149/OPA.45.2.105

M3 - Article

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