Measurement of the vibration state of an array of micro cantilevers by diffractional methods

A. Cuadrado, J. Agustí, M. López-Suárez, G. Murillo, G. Abadal, J. Alda

Research output: Contribution to journalArticleResearchpeer-review

Abstract

The amplitude of vibration of an array of micro-cantilevers piezoelectrically excited has been measured by analyzing the diffraction pattern given by the structure. A model for the simulation of this situation, and some out-of-plane interferometric measurements based on diffraction pattern, have been developed and performed to fully understand the dynamic of the elements and the diffraction pattern produced by them. © Sociedad Española de Óptica.
Original languageEnglish
Pages (from-to)105-111
JournalOptica Pura y Aplicada
Volume45
Issue number2
DOIs
Publication statusPublished - 27 Dec 2012

Keywords

  • Diffraction
  • Micro-electro-mechanical systems

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