| Original language | English |
|---|---|
| Pages (from-to) | 407-412 |
| Journal | J. Cryst. Growth |
| Volume | 102 |
| Publication status | Published - 1 Jan 1990 |
Mathematical Morphology applied to integrated circuit inspection.
J. Vitria, J.J. Villanueva
Research output: Contribution to journal › Article › Research