LTCC microflow analyzers with monolithic integration of thermal control

Cynthia S. Martínez-Cisneros; Núria Ibáñez-García; Francisco Valdés; Julián Alonso

doi:10.1016/j.sna.2007.04.059

LTCC microflow analyzers with monolithic integration of thermal control

Cynthia S. Martínez-Cisneros, Núria Ibáñez-García, Francisco Valdés, Julián Alonso

Research output: Contribution to journal › Article › Research › peer-review

27 Citations (Scopus)

Abstract

Recently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems. © 2007 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	63-70
Journal	Sensors and Actuators, A: Physical
Volume	138
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2007.04.059
Publication status	Published - 20 Jul 2007

Keywords

Electronics
Fluidics
LTCC
Miniaturization
Temperature control

Access to Document

10.1016/j.sna.2007.04.059

Cite this

@article{59f9fe4a18804520913a1fc98737abe7,

title = "LTCC microflow analyzers with monolithic integration of thermal control",

abstract = "Recently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems. {\textcopyright} 2007 Elsevier B.V. All rights reserved.",

keywords = "Electronics, Fluidics, LTCC, Miniaturization, Temperature control",

author = "Mart{\'i}nez-Cisneros, {Cynthia S.} and N{\'u}ria Ib{\'a}{\~n}ez-Garc{\'i}a and Francisco Vald{\'e}s and Juli{\'a}n Alonso",

year = "2007",

month = jul,

day = "20",

doi = "10.1016/j.sna.2007.04.059",

language = "English",

volume = "138",

pages = "63--70",

number = "1",

}

TY - JOUR

T1 - LTCC microflow analyzers with monolithic integration of thermal control

AU - Martínez-Cisneros, Cynthia S.

AU - Ibáñez-García, Núria

AU - Valdés, Francisco

AU - Alonso, Julián

PY - 2007/7/20

Y1 - 2007/7/20

N2 - Recently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems. © 2007 Elsevier B.V. All rights reserved.

AB - Recently, the low temperature co-fired ceramics technology has shown to be an excellent alternative to silicon-based microfabrication techniques for the production of three-dimensional structures using a multi-layer approach. This enables the integration of several unitary operations of a classical analytical process and also the integration of sensors, actuators and electronics in the same substrate. In this work, we show the integration of the actuators and the sensors needed for the control of temperature inside a miniaturized fluidic device. The proposed device presents enough thermal accuracy to be used in chemical systems where temperature control is a crucial factor, such as enzyme reactions or polymerase chain reaction systems. © 2007 Elsevier B.V. All rights reserved.

KW - Electronics

KW - Fluidics

KW - LTCC

KW - Miniaturization

KW - Temperature control

U2 - 10.1016/j.sna.2007.04.059

DO - 10.1016/j.sna.2007.04.059

M3 - Article

SN - 0924-4247

VL - 138

SP - 63

EP - 70

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 1

ER -

LTCC microflow analyzers with monolithic integration of thermal control

Abstract

Keywords

Access to Document

Fingerprint

Cite this