Low temperature SiC growth by metalorganic LPCVD on MBE carbonized Si (001) substrates

E. Hurtòs, J. Rodríguez-Viejo, J. Bassas, M.T. Clavaguera-Mora, K. Zekentes

Research output: Contribution to journalArticleResearch

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)549-552
JournalMater. sci. eng., B
Volume61-62
Publication statusPublished - 1 Jul 1999

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