Low temperature SiC growth by metalorganic LPCVD on MBE carbonized Si (001) substrates

E. Hurtòs, J. Rodríguez-Viejo, J. Bassas, M.T. Clavaguera-Mora, K. Zekentes

Research output: Contribution to journal › Article › Research

Cite this

@article{72f695d20c60467990a656b0e025501b,

title = "Low temperature SiC growth by metalorganic LPCVD on MBE carbonized Si (001) substrates",

author = "E. Hurt{\`o}s and J. Rodr{\'i}guez-Viejo and J. Bassas and M.T. Clavaguera-Mora and K. Zekentes",

year = "1999",

month = jul,

day = "1",

language = "English",

volume = "61-62",

pages = "549--552",

}