Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella; Jaume Esteve; Josep Montserrat; Arantxa Uranga; Gabriel Abadal; Nuria Barniol; Albert Romano-Rodríguez

doi:10.1063/1.2234305

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella, Jaume Esteve, Josep Montserrat, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Albert Romano-Rodríguez

Research output: Contribution to journal › Article › Research › peer-review

51 Citations (Scopus)

Abstract

A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.

Original language	English
Article number	033507
Journal	Applied physics letters
Volume	89
DOIs	https://doi.org/10.1063/1.2234305
Publication status	Published - 28 Jul 2006

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title = "Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators",

abstract = "A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. {\textcopyright} 2006 American Institute of Physics.",

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AU - Campanella, Humberto

AU - Esteve, Jaume

AU - Montserrat, Josep

AU - Uranga, Arantxa

AU - Abadal, Gabriel

AU - Barniol, Nuria

AU - Romano-Rodríguez, Albert

PY - 2006/7/28

Y1 - 2006/7/28

N2 - A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.

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VL - 89

JO - Applied physics letters

JF - Applied physics letters

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ER -

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

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