Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella, Jaume Esteve, Josep Montserrat, Arantxa Uranga, Gabriel Abadal, Nuria Barniol, Albert Romano-Rodríguez

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43 Citations (Scopus)

Abstract

A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.
Original languageEnglish
Article number033507
JournalApplied Physics Letters
Volume89
DOIs
Publication statusPublished - 28 Jul 2006

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