A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.
|Journal||Applied Physics Letters|
|Publication status||Published - 28 Jul 2006|
Campanella, H., Esteve, J., Montserrat, J., Uranga, A., Abadal, G., Barniol, N., & Romano-Rodríguez, A. (2006). Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators. Applied Physics Letters, 89, . https://doi.org/10.1063/1.2234305