TY - JOUR
T1 - Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators
AU - Campanella, Humberto
AU - Esteve, Jaume
AU - Montserrat, Josep
AU - Uranga, Arantxa
AU - Abadal, Gabriel
AU - Barniol, Nuria
AU - Romano-Rodríguez, Albert
PY - 2006/7/28
Y1 - 2006/7/28
N2 - A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.
AB - A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing performance of the resonators: (a) distributed loading with a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode. For the distributed and localized cases, the minimum detectable mass changes are 1.58×10-8 g/cm2 and 7×10-15g, respectively. © 2006 American Institute of Physics.
U2 - https://doi.org/10.1063/1.2234305
DO - https://doi.org/10.1063/1.2234305
M3 - Article
SN - 0003-6951
VL - 89
JO - Applied Physics Letters
JF - Applied Physics Letters
M1 - 033507
ER -