Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)651-657
JournalJournal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X)
Volume11
DOIs
Publication statusPublished - 1 Jan 1993

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