Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy

F. Pérez, N. Barniol, X. Aymerich

Department of Physics

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	651-657
Journal	Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X)
Volume	11
DOIs	https://doi.org/10.1116/1.586815
Publication status	Published - 1 Jan 1993

Access to Document

10.1116/1.586815

Cite this

Pérez, F., Barniol, N., & Aymerich, X. (1993). Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), 11, 651-657. https://doi.org/10.1116/1.586815

Pérez, F. ; Barniol, N. ; Aymerich, X. / Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. In: Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X). 1993 ; Vol. 11. pp. 651-657.

@article{af45426d3bd14bafaf9daca60fcfcc2a,

title = "Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy",

author = "F. P{\'e}rez and N. Barniol and X. Aymerich",

year = "1993",

month = jan,

day = "1",

doi = "10.1116/1.586815",

language = "English",

volume = "11",

pages = "651--657",

journal = "Journal of Vacuum Science and Technology",

issn = "0022-5355",

publisher = "American Institute of Physics",

}

Pérez, F, Barniol, N & Aymerich, X 1993, 'Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy', Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), vol. 11, pp. 651-657. https://doi.org/10.1116/1.586815

Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. / Pérez, F.; Barniol, N.; Aymerich, X.

In: Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), Vol. 11, 01.01.1993, p. 651-657.

Research output: Contribution to journal › Article › Research

TY - JOUR

T1 - Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy

AU - Pérez, F.

AU - Barniol, N.

AU - Aymerich, X.

PY - 1993/1/1

Y1 - 1993/1/1

U2 - 10.1116/1.586815

DO - 10.1116/1.586815

M3 - Article

VL - 11

SP - 651

EP - 657

JO - Journal of Vacuum Science and Technology

JF - Journal of Vacuum Science and Technology

SN - 0022-5355

ER -

Pérez F, Barniol N , Aymerich X. Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X). 1993 Jan 1;11:651-657. https://doi.org/10.1116/1.586815