Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy

F. Pérez; N. Barniol; X. Aymerich

doi:10.1116/1.586815

Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy

Department of Physics

Research output: Contribution to journal › Article › Research

Original language	English
Pages (from-to)	651-657
Journal	Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X)
Volume	11
DOIs	https://doi.org/10.1116/1.586815
Publication status	Published - 1 Jan 1993

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10.1116/1.586815

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Pérez, F., Barniol, N., & Aymerich, X. (1993). Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), 11, 651-657. https://doi.org/10.1116/1.586815

Pérez, F. ; Barniol, N. ; Aymerich, X. / Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. In: Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X). 1993 ; Vol. 11. pp. 651-657.

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author = "F. P{\'e}rez and N. Barniol and X. Aymerich",

year = "1993",

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doi = "10.1116/1.586815",

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Pérez, F, Barniol, N & Aymerich, X 1993, 'Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy', Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), vol. 11, pp. 651-657. https://doi.org/10.1116/1.586815

Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. / Pérez, F.; Barniol, N.; Aymerich, X.

In: Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X), Vol. 11, 01.01.1993, p. 651-657.

Research output: Contribution to journal › Article › Research

Pérez F, Barniol N , Aymerich X. Local modification of HF-treated silicon (100) surface and its characterizatio by scanning tunneling microscopy and spectroscopy. Journal of vacuum science and technology (1964-1968: Continuada a partir del 1983 per "Journal of vacuum science & technology. A", ISSN: 0734-2101 i "Journal of vacuum science & technology. B", ISSN: 0734-211X). 1993 Jan 1;11:651-657. https://doi.org/10.1116/1.586815