Limitations of the spreading resistance technique for ion implant profile measurements

Translated title of the contribution: Limitations of the spreading resistance technique for ion implant profile measurements

J. Montserrat, J. Bausells, LORA TAMAYO E.

Research output: Contribution to journal › Article › Research › peer-review

Fingerprint

Dive into the research topics of 'Limitations of the spreading resistance technique for ion implant profile measurements'. Together they form a unique fingerprint.

Medicine and Dentistry