Limitations of the spreading resistance technique for ion implant profile measurements

Translated title of the contribution: Limitations of the spreading resistance technique for ion implant profile measurements

J. Montserrat, J. Bausells, LORA TAMAYO E.

Research output: Contribution to journalArticleResearch

Translated title of the contributionLimitations of the spreading resistance technique for ion implant profile measurements
Original languageMultiple languages
Pages (from-to)261-265
JournalNuclear instruments & methods in physics research. Section A, Accelerators, spectometers, detectors and associated equipment
Volume55
Publication statusPublished - 1 Jan 1991

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