Lateral Spread of Implanted Ion Distributions in 6H-SiC: Simulation

E. Morvan, N. Mestres, J. Pascual, D. Flores, M. Vellvehi, J. Rebollo

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)
Original languageEnglish
Pages (from-to)373-377
JournalMater. sci. eng., B
Volume61-62
Publication statusPublished - 1 Jul 1999

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