Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)98-106
JournalProceedings of SPIE, The international Society for Optical Engineering
Volume5836
Issue number11
DOIs
Publication statusPublished - 1 Jan 2005

Cite this

Verd, J., Teva, J., Abadal, G., Pérez-Murano, F., Esteve, J., & Barniol, N. (2005). Large-signal model of a resonating cantilever-based transducer for system level electrical simulation. Proceedings of SPIE, The international Society for Optical Engineering, 5836(11), 98-106. https://doi.org/10.1117/12.608462