Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Contribution to journalArticleResearch

Original languageEnglish
Pages (from-to)98-106
JournalProceedings of SPIE, The international Society for Optical Engineering
Volume5836
Issue number11
DOIs
Publication statusPublished - 1 Jan 2005

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