Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

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Original language	English
Pages (from-to)	98-106
Journal	Proceedings of SPIE, The international Society for Optical Engineering
Volume	5836
Issue number	11
DOIs	https://doi.org/10.1117/12.608462
Publication status	Published - 1 Jan 2005

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AU - Pérez-Murano, F.

AU - Esteve, J.

AU - Barniol, N.

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