Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

J. Verd, J. Teva, G. Abadal, F. Pérez-Murano, J. Esteve, N. Barniol

Research output: Chapter in BookChapterResearch

Original languageEnglish
Title of host publicationSPIE International Symposium on Microtechnologies for The New Millenium
Place of PublicationSevilla (ES)
Pages98-106
Number of pages8
Edition1
Publication statusPublished - 1 May 2005

Publication series

NameProceedings of SPIE; 5836

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