Abstract
This work reports the ion beam synthesis of n-doped SiC layers. For this, two approaches have been studied: (i) conventional method of doping by implanting with N + into an ion beam synthesised SiC layer and (ii) a novel method based on pre-doping (with N + and P + ) of the Si wafers before the ion beam synthesis of SiC. For the N + implantation the electrical data show a p-type overcompensation of the SiC layers for both doping methods used. The structural (XRD) and in-depth (SIMS, spreading resistance) analysis of the samples suggest this overcompensation to be induced by p-type active defects related to the N + ion implantation damage, and therefore, the need for further optimisation of their thermal processing. In contrast, the P + -doped SiC layers always show n-type conductivity. This is also accompanied by a higher structural quality, being the spectral features of the layers similar to those from the undoped material. Our electrical data, together with the absence of additional stress related to P-implant suggests that this technique could be suitable to avoid effects related to the ion implantation damage in the SiC lattice, although the electrical activation of P in the SiC lattice is about one order of magnitude lower than in Si. © 2001 Published by Elsevier Science B.V.
Original language | English |
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Pages (from-to) | 367-371 |
Journal | Applied Surface Science |
Volume | 184 |
Issue number | 1-4 |
DOIs | |
Publication status | Published - 12 Dec 2001 |
Keywords
- Doping
- Ion beam synthesis
- Ion implantation
- SiC on Si