Interplay of Voltage and Temperature Acceleration of Oxide Breakdown for Ultra-Thin Oxides

E. Wu, J. Suñé, W. Lai, E. Nowak, J. McKenna, A. Vayshenker, D. Harmon

    Research output: Contribution to journalArticleResearch

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)25-31
    JournalMicroelectronic Engineering
    Volume59
    Issue number1-4
    DOIs
    Publication statusPublished - 1 Jan 2001

    Cite this