Integration of NEMS resonators in a 65 nm CMOS technology

J. L. Muñoz Gamarra, P. Alcaide, E. Marigó, J. Giner, A. Uranga, J. Esteve, N. Barniol

Research output: Contribution to journalArticleResearch

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)246-249
JournalMicroelectronic Enginering
Volume110
Publication statusPublished - 1 Jan 2013

Cite this