Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

J. Verd, Arantxa Uranga, J. Teva, J. L. López, F. Torres, J. Esteve, G. Abadal, Frances Pérez-Murano, N. Barniol

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66 Citations (Scopus)

Abstract

A bridge-shaped first-lateral-mode 60-MHz mechanical resonator, which is monolithically integrated with capacitive CMOS readout electronics, is presented. The resonator is fabricated directly on a commercial CMOS technology using the top metal level as a structural layer. A maskless single-step wet-etching process for mechanical structure release after the standard CMOS integration process is the only postfabrication requirement. Electrical characterization of the electromechanical device demonstrates the feasibility of implementing a CMOS-microelectromechanical system for high-frequency applications using a standard conventional CMOS technology. © 2006 IEEE.
Original languageEnglish
Pages (from-to)495-497
JournalIEEE Electron Device Letters
Volume27
DOIs
Publication statusPublished - 1 Jun 2006

Keywords

  • CMOS-microelectromechanical system (MEMS)
  • High-frequency resonators
  • Integrated resonators
  • Mechanical resonators

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