Integrated CMOS-MEMS with on chip read-out electronics for high frequency applications

J. Verd, A. Uranga, J. Teva, J.L. López, F. Torres, J. Esteve, G. Abadal, F. Pérez-Murano N. Barniol

Research output: Contribution to journalArticleResearch

66 Citations (Scopus)
Original languageEnglish
Pages (from-to)495-497
JournalIEEE Electron Device Letters
Volume6
Publication statusPublished - 1 Jan 2006

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